ISO 15632:2021 pdf download – Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). 3.9 peak height maximum signal intensity (3.8) of a spectral peak measured as height of the peak above a defined background signal (3.11) 3.10 peak area net peak area sum of signal intensities (3.8) of a spectral peak after background signal (3.11) removal 3.11 background signal continuous X-ray spectrum continuum non-characteristic component of an X-ray spectrum arising from the bremsstrahlung (3.12) and other effects...